2025.02.16
Koki Shibata, Takashi Ota, Koji Ando, Naoko Misawa, Chihiro Matsui and Ken Takeuchi, “Invertible Prediction Model for Si3N4 Wet Etching Using DHF”, 9th IEEE Electron Devices Technology and Manufacturing (EDTM) Conference 2025, March 9-12, 2025.
Adil Padiyal, Tao Wang, Naoko Misawa, Chihiro Matsui and Ken Takeuchi, “Investigation of Effects of Non-Volatile Memory-based Computation-in-Memory Non-Idealities and Model Size on Performance and Robustness of Small Language Model During Inference Phase”, 9th IEEE Electron Devices Technology and Manufacturing (EDTM) Conference 2025, March 9-12, 2025.