Conference Presentation at IEEE Silicon Nanoelectronics Workshop (SNW)（June 16, 2024）

Koki Shibata, Hiroshi Horiguchi, Chihiro Matsui and Ken Takeuchi, “Automated Recipe Creation and Verification of Single Wafer Wet Etching: Ensemble Learning with Backcasting and Forecasting AIs Using Scarce Data,” IEEE Silicon Nanoelectronics Workshop (SNW) Poster, June 16, 2024, pp. 117-118.