Conference Presentation & Best Student Award at AEC/APC (Advanced Equipment Control/Advanced Process Control) Symposium Asia 2025（November 25-26, 2025）

Koki Shibata, Hiroshi Horiguchi, Chihiro Matsui and Ken Takeuchi, “Real-time Automated Recipe Creation & Verification of Single Wafer Wet Etching with Backcasting & Forecasting Ais,” AEC/APC (Advanced Equipment Control/Advanced Process Control) Symposium Asia 2025, November 25, 2025.