Conference Presentation at AEC/APC (Advanced Equipment Control/Advanced Process Control) Symposium Asia 2023（November 2, 2023）

Chihiro Matsui, Shinsei Yoshikiyo, Hiroshi Horiguchi and Ken Takeuchi, “Comparison of Numerical Method with Prefixed Profile and Machine Learning-based Method for Wet Etching Amount Prediction”, AEC/APC (Advanced Equipment Control/Advanced Process Control) Symposium Asia 2023, November 2, 2023.